Real-time monitoring of indium tin oxide laser ablation in liquid crystal display patterning

Materials Research Society Symposium - Proceedings

Volumn 526, Issue , 1998, Pages 91-96

  Hong, M H ^a   Lu, Y F ^a   Meng, M ^a   Low, T S ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; EMISSION SPECTROSCOPY; EXCIMER LASERS; GLASS; LASER ABLATION; LASER PULSES; LIQUID CRYSTAL DISPLAYS;

INDIUM TIN OXIDE; OPTICAL MULTICHANNEL ANALYZERS; PLASMA EMISSION SPECTROSCOPY;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0032308935     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-526-91     Document Type: Conference Paper

References (10)