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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4426, Issue , 2002, Pages 221-224

Growth of (001)-oriented PZT thin films on amorphous SiO2 by pulsed laser deposition

(5) Zhao, Jing a Lu, Li a,b Thompson, C V a,c Lu, Y F d Song, W D d

a National University of Singapore ^* (Singapore)

b NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

c MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

d DATA STORAGE INSTITUTE (Singapore)

Author keywords

MgO; PLD; PZT; SiO2; YBCO

Indexed keywords

AMORPHOUS SILICON; CRYSTALLOGRAPHY; DOPING (ADDITIVES); FILM GROWTH; PULSED LASER DEPOSITION; SILICA; SILICON WAFERS; SUBSTRATES; YTTRIUM BARIUM COPPER OXIDES;

FERROELECTRIC MEMORIES;

THIN FILMS;

EID: 0036384662 PISSN: 0277786X EISSN: None Source Type: Journal
DOI: 10.1117/12.456840 Document Type: Article

Times cited : (1)

References (21)

1
- 35348846979
- J.F. Scott, C.A. Paz de Araujo, Science 246 (1989) 1400.
- (1989) Science , vol.246 , pp. 1400
- Scott, J.F.¹ Paz de Araujo, C.A.²

2
- 0001571869
- S.L. Miller, P.J. Mcwhorter, J. Appl. Phys. 72 (1992) 5999.
- (1992) J. Appl. Phys. , vol.72 , pp. 5999
- Miller, S.L.¹ McWhorter, P.J.²

3
- 0000084413
- R.Ramesh (Ed.), Kluwer, Boston
- B.A. Tuttle, in: R. Ramesh (Ed.), Thin Film Ferroelectric Materials and Devices, Kluwer, Boston, (1997) 145.
- (1997) Thin Film Ferroelectric Materials and Devices , pp. 145
- Tuttle, B.A.¹

4
- 0001171597
- Integrated ferroelectric microelectronechanical system (MEMS)
- D.L. Polla, P.J. Shiller, Integrated ferroelectric microelectronechanical system (MEMS), Int, Ferroelectrics 7 (1995) 359.
- (1995) Int, Ferroelectrics , vol.7 , pp. 359
- Polla, D.L.¹ Shiller, P.J.²

5
- 0025862618
- Ferroelectric thin film ultrasonic micromotors
- K.R. Udayakumar, J. Chen, A.M. Flynn, S.F. Bart, L.S. Tavrow, D.J. Ehrlich, L.E. Cross, R.A. Brooks, Ferroelectric thin film ultrasonic micromotors, IEEE Ultrasonic Symposium Proceedings, 1991, 58.
- (1991) IEEE Ultrasonic Symposium Proceedings , pp. 58
- Udayakumar, K.R.¹ Chen, J.² Flynn, A.M.³ Bart, S.F.⁴ Tavrow, L.S.⁵ Ehrlich, D.J.⁶ Cross, L.E.⁷ Brooks, R.A.⁸

6
- 0032664852
- E. Cattan, T. Haccart, G. Vélu, D. Rémiens, C. Bergaud, L. Nicu, Sensors and Actuators, 74 (1999) 60.
- (1999) Sensors and Actuators , vol.74 , pp. 60
- Cattan, E.¹ Haccart, T.² Vélu, G.³ Rémiens, D.⁴ Bergaud, C.⁵ Nicu, L.⁶

7
- 0029637546
- H. Lin, N.J. Wu, F. Geiger, K. Xie, A. Ignatiey, Appl. Phys. Lett. 66 (1995) 1172.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1172
- Lin, H.¹ Wu, N.J.² Geiger, F.³ Xie, K.⁴ Ignatiey, A.⁵

8
- 0029387902
- Neung-Ho Cho, Ho-Gi Kim, Thin Solid Films 266 (1995) 140.
- (1995) Thin Solid Films , vol.266 , pp. 140
- Cho, N.-H.¹ Kim, H.-G.²

9
- 0029370184
- Atsushi Masuda, Yasuhiro Uamanaka, Mitsutoshi Tazoe, Yasuto Uonezawa, Jpn. J. Appl. Phys. 34 (1995) 5154.
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 5154
- Masuda, A.¹ Uamanaka, Y.² Tazoe, M.³ Uonezawa, Y.⁴

10
- 0003314145
- W. Biegel, R. Klarmann, M. Hanika, K. Sturm, B. Stritzker, Mater. Sci. and Eng. B56 (1998), 195.
- (1998) Mater. Sci. And Eng. , pp. 195
- Biegel, W.¹ Klarmann, R.² Hanika, M.³ Sturm, K.⁴ Stritzker, B.⁵

11
- 0035335665
- Jing Zhao, Li Lu, C.V. Thompson, Y.F. Lu, W.D. Song, J. Cryst. Growth 225 (2001) 173.
- (2001) J. Cryst. Growth , vol.225 , pp. 173
- Zhao, J.¹ Lu, L.² Thompson, C.V.³ Lu, Y.F.⁴ Song, W.D.⁵

12
- 36449005174
- R. Ramesh, A. Inam, W. K. Chan, F. Tillerot, B. Wilkens, C. C. Chang, T. Sands, J. M. Tarascon and V. G. Keramidas, Apply. Phys. Lett, 59 (1999) 3542.
- (1999) Apply. Phys. Lett , vol.59 , pp. 3542
- Ramesh, R.¹ Inam, A.² Chan, W.K.³ Tillerot, F.⁴ Wilkens, B.⁵ Chang, C.C.⁶ Sands, T.⁷ Tarascon, J.M.⁸ Keramidas, V.G.⁹

13
- 36449001663
- D.K. Fork, F.A. Ponce, J.C. Tramontana, T.H. Geballe, Appl. Phys. Lett. 58 (1991) 2294.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 2294
- Fork, D.K.¹ Ponce, F.A.² Tramontana, J.C.³ Geballe, T.H.⁴

14
- 0001360924
- M. Tonouchi, Y. Sakaguchi and T. Kobayashi, J. Appl. Phys., 62 (1987), 961.
- (1987) J. Appl. Phys. , vol.62 , pp. 961
- Tonouchi, M.¹ Sakaguchi, Y.² Kobayashi, T.³

15
- 0032482859
- P.A. Stampe, R.J. Kennedy, Thin Solid Films, 326, (1998), 63.
- (1998) Thin Solid Films , vol.326 , pp. 63
- Stampe, P.A.¹ Kennedy, R.J.²

16
- 0343713806
- J.J. Filman, J. Appl. Phys., 31 (1960), 2208.
- (1960) J. Appl. Phys. , vol.31 , pp. 2208
- Filman, J.J.¹

17
- 0001708677
- R.K. Singh, J. Narayan, A.K. Singh, and J. Krishnaswamy, Appl. Phys. Lett. 54 (1989) 2271.
- (1989) Appl. Phys. Lett. , vol.54 , pp. 2271
- Singh, R.K.¹ Narayan, J.² Singh, A.K.³ Krishnaswamy, J.⁴

18
- 36549095613
- C.H. Chen, J. Kwo, and M. Hong, Appl. Phys. Lett. 52 (1988) 841.
- (1988) Appl. Phys. Lett. , vol.52 , pp. 841
- Chen, C.H.¹ Kwo, J.² Hong, M.³

19
- 0000458476
- J.Q. Zheng, M.C. Shih, S. Williams, S.J. Lee, Hiroshi Kajiyama, X. K. Wang, Z. Zhao, Appl. Phys. Lett. 59 (1991), 231.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 231
- Zheng, J.Q.¹ Shih, M.C.² Williams, S.³ Lee, S.J.⁴ Kajiyama, H.⁵ Wang, X.K.⁶ Zhao, Z.⁷

20
- 0000149785
- O.P. Karpenko, J. C. Bilello, and S. M. Yalisove, J. Appl. Phys. 76 (1994), 4610.
- (1994) J. Appl. Phys. , vol.76 , pp. 4610
- Karpenko, O.P.¹ Bilello, J.C.² Yalisove, S.M.³

21
- 0001043330
- N., Sonnenberg, A.S, Longo, M.J. Cima, B.P. Chang, K.G. Ressler, P.C. Mcintyre, Y.P. Liu, J. Appl. Phys. 74 (1993), 1027.
- (1993) J.Appl. Phys. , vol.74 , pp. 1027
- Sonnenberg, N.¹ Longo, A.S.² Cima, M.J.³ Chang, B.P.⁴ Ressler, K.G.⁵ McIntyre, P.C.⁶ Liu, Y.P.⁷

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