Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition

Journal of Crystal Growth

Volumn 225, Issue 2-4, 2001, Pages 173-177

  Zhao, Jing ^a   Lu, Li ^a   Thompson, C V ^a   Lu, Y F ^b   Song, W D ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b DATA STORAGE INSTITUTE   (Singapore)

Author keywords

A3. Laser epitaxy; A3. Pulsed laser deposition

Indexed keywords

EPITAXIAL GROWTH; EXCIMER LASERS; FILM PREPARATION; PULSED LASER DEPOSITION; SEMICONDUCTING LEAD COMPOUNDS; SILICON WAFERS; SUBSTRATES; THIN FILMS;

LASER EPITAXY;

SEMICONDUCTING FILMS;

EID: 0035335665     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)00865-X     Document Type: Conference Paper

References (20)