Determination and critical assessment of the optical properties of common substrate materials used in III-V nitride heterostructures with vacuum ultraviolet spectroscopic ellipsometry

Materials Research Society Symposium - Proceedings

Volumn 693, Issue , 2002, Pages 509-514

  Edwards, N V ^a   Lindquist, O P A ^a   Madsen, L D ^a   Zollner, S ^a   Jarrehdahl K ^a   Cobet, C ^a   Peters, S ^a   Esser, N ^a   Konkar, A ^a   Aspnes, D E ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; BAND STRUCTURE; DIELECTRIC PROPERTIES OF SOLIDS; ELLIPSOMETRY; NITRIDES; OPTICAL PROPERTIES; SUBSTRATES; SURFACE TREATMENT; ULTRAVIOLET SPECTROSCOPY; VACUUM APPLICATIONS;

OPTICAL CONSTANT; OPTICAL TRANSITIONS; POLYTYPISM; VACUUM ULTRAVIOLET SPECTROSCOPIC ELLIPSOMETRY;

HETEROJUNCTIONS;

EID: 0036375801     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)