Superior structural quality of newly developed GaN pendeo-epitaxial layers

Materials Research Society Symposium - Proceedings

Volumn 693, Issue , 2002, Pages 309-314

  Liliental Weber, Z ^a   Jasinski, J ^a   Cherns, D ^a   Baines, M ^a   Davis, R ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; ETCHING; NUCLEATION; SILICON NITRIDE; TRANSMISSION ELECTRON MICROSCOPY;

MISORIENTATION; PENDEO-EPITAXIAL LAYERS;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0036374057     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)