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Volumn 15, Issue 2, 2002, Pages 317-321
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Refractive index and transmittance optimization of C-S-Au film by plasma process
a
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Author keywords
C S Au Film; Gold; Optical transmittance; Refractive Index; RF Plasma CVD; Sputtering
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Indexed keywords
ARGON;
CARBON;
FLUORINE DERIVATIVE;
GOLD;
METHANE;
SILICON;
SULFUR;
ARTICLE;
CHEMICAL MODIFICATION;
ELECTRODE;
FILM;
FLOW RATE;
GAS;
HEAT TREATMENT;
OPTICS;
REFRACTION INDEX;
SURFACE PROPERTY;
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EID: 0036368794
PISSN: 09149244
EISSN: None
Source Type: Journal
DOI: 10.2494/photopolymer.15.317 Document Type: Article |
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Times cited : (4)
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References (9)
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