Refractive index control with using C-S-Au compound by plasma CVD and sputtering

Journal of Photopolymer Science and Technology

Volumn 14, Issue 1, 2001, Pages 123-126

  Matushita, Masaki ^a   Kashem, Md Abul ^a   Morita, Shinzo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

C S compound; C S Au compound; Refractive Index; RF plasma CVD

Indexed keywords

CARBON; FLUORIDE SODIUM; GOLD; GRAPHITE; METHANE; SULFUR;

ARTICLE; ELECTRODE; FLOW RATE; FREQUENCY ANALYSIS; PRESSURE MEASUREMENT; REFRACTION INDEX;

EID: 0035754719     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.14.123     Document Type: Article

References (7)