Focused electron beam induced deposition of gold and rhodium

Materials Research Society Symposium - Proceedings

Volumn 624, Issue , 2000, Pages 171-177

  Hoffmann, P ^a   Utke, I ^a   Cicoira, F ^a   Dwir, B ^a   Leifer, K ^a   Kapon, E ^a   Doppelt, P ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRON BEAMS; ELECTRON SCATTERING; GOLD; HEATING; RHODIUM;

ELECTRON BEAM INDUCED DEPOSITION; HALOGENO; TRIFLUOROPHOSPHINE LIGANDS;

DEPOSITION;

EID: 0034449094     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-624-171     Document Type: Conference Paper

References (7)