Effects of surface constraints on stresses in heteroepitaxial films grown on compliant substrates

Materials Research Society Symposium - Proceedings

Volumn 695, Issue , 2002, Pages 65-70

  Feng, Zhaohua ^a   Lovell, Edward G ^a   Engelstad, Roxann L ^a   Kuech, Thomas F ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL LATTICES; EPITAXIAL GROWTH; FILM GROWTH; FINITE ELEMENT METHOD; INTERFACES (MATERIALS); MATHEMATICAL MODELS; STRAIN RATE; STRESSES; SUBSTRATES; SURFACE TREATMENT;

HETEROEPITAXIAL FILMS; LATTICE MISMATCH STRAIN; SURFACE CONSTRAINTS;

THIN FILMS;

EID: 0036351639     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Stress generation and relaxation during film heteroepitaxy on a compliant substrate with a viscoelastic glass interlayer