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Volumn 705, Issue , 2002, Pages 73-79
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All CO2-processed fluoropolymer-containing photoresist systems
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON DIOXIDE;
FLUORINE CONTAINING POLYMERS;
ORGANIC SOLVENTS;
PHOTORESISTS;
RESINS;
SPIN COATING;
ULTRATHIN FILMS;
ULTRAVIOLET SPECTROSCOPY;
VISCOSITY;
AQUEOUS WASTE;
CARBON DIOXIDE COMPATIBLE RESIST SYSTEM;
LIQUID CARBON DIOXIDE;
NANOTECHNOLOGY;
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EID: 0036350233
PISSN: 02729172
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (2)
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References (9)
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