The characterization of initial growth of polycrystalline silicon germanium films on zirconium oxide

Materials Research Society Symposium - Proceedings

Volumn 686, Issue , 2002, Pages 217-222

  Kim, Dong Won ^a   Prins, Freek ^a   Ko, Kil Soo ^a   Lee, C H ^a   Kwong, Dim Lee ^a   Banerjee, Sanjay ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; DIELECTRIC FILMS; FILM GROWTH; INTERFACES (MATERIALS); SILICON ALLOYS; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

GATE OXIDES;

POLYCRYSTALLINE MATERIALS;

EID: 0036349407     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)