Integration challenges for double-gate MOSFET technologies

Materials Research Society Symposium - Proceedings

Volumn 686, Issue , 2002, Pages 59-68

  Maszara, W P ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ELECTRON TUNNELING; EPITAXIAL GROWTH; ETCHING; GATES (TRANSISTOR);

WAFER BONDING;

MOSFET DEVICES;

EID: 0036346964     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (31)