Electron energy control in inductively coupled plasma employing multimode antenna

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 9 A/B, 1999, Pages

  Shindo, Haruo ^a   Urayama, Takuya ^a   Fujii, Takashi ^a   Horiike, Yasuhiro ^b   Fujii, Syuitsu ^c  

^a TOKAI UNIVERSITY   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c ADTEC Plasma Technology Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; CARRIER CONCENTRATION; ELECTRON ENERGY LEVELS; INTEGRATED CIRCUIT MANUFACTURE; SEMICONDUCTOR PLASMAS; SPECTROSCOPIC ANALYSIS;

ELECTRON ENERGY CONTROL; INDUCTIVELY COUPLED PLASMAS (ICP); MULTIMODE ANTENNAS;

ULSI CIRCUITS;

EID: 0033341819     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.l1066     Document Type: Article

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