Investigation into polishing process of CVD diamond films

Materials and Manufacturing Processes

Volumn 17, Issue 1, 2002, Pages 45-55

  Guo, Z N ^a   Wang, C Y ^a   Kuang, T C ^a  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Chemical vapor deposition; Coated material; Diamond film; Electro discharge machining; Engineering; Experimental investigation; Graphitization; Industry; Machining parameters; Material property; New technique; Polishing; Process; Removal mechanism; Rotating electrode

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRODES; GRAPHITIZATION; MACHINING; POLISHING; SURFACE PROPERTIES;

ELECTRO-DISCHARGE MACHINING; REMOVAL MECHANISM; ROTATING ELECTRODE; ROUGH POLISHING; SINGLE PULSE DISCHARGE;

DIAMOND FILMS;

EID: 0036250390     PISSN: 10426914     EISSN: None     Source Type: Journal    
DOI: 10.1081/AMP-120002796     Document Type: Article

References (7)

1. Laser processing of diamond films. Diamond films
2. Hot-iron-metal polishing machine for CVD diamond films and characteristics of the polished surfaces
3. Atomic level smoothing of CVD diamond films by gas cluster ion beam etching
4. Diamond shaping and polishing by chemical reactions
5. Diamond film polishing with abrasive suspension jets: An exploratory investigation
6. Oxygen-ion beam polishing of a 5-cm diameter film
7. Surface characterization of diamond films polished by thermomechanical polishing method