Micro-opto-mechanical vibration sensor integrated on silicon

Journal of Lightwave Technology

Volumn 17, Issue 1, 1999, Pages 26-29

  Ollier, Eric ^a   Philippe, Paul ^a   Chabrol, Claude ^a   Mottier, Patrick ^a  

^a CEA LETI   (France)

Author keywords

Hydroelectric generators; Integrated optics; Micro opto electro mechanical systems; Micromachining; Vibration measurement

Indexed keywords

HYDROELECTRIC GENERATORS; INTEGRATED OPTICS; INTEGRATED OPTOELECTRONICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; SEMICONDUCTING SILICON; VIBRATION MEASUREMENT;

MICROOPTICAL VIBRATION SENSORS; MICROOPTOELECTROMECHANICAL SYSTEMS;

OPTICAL SENSORS;

EID: 0032761260     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.737417     Document Type: Article

References (10)

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