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Volumn 15, Issue 1, 2002, Pages 48-51
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HEMTs on LEPECVD-grown virtual SiGe substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
HETEROJUNCTIONS;
MOLECULAR BEAM EPITAXY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR QUANTUM WELLS;
SILICON WAFERS;
SUBSTRATES;
TRANSMISSION ELECTRON MICROSCOPY;
WIRELESS TELECOMMUNICATION SYSTEMS;
SILICON GERMANIUM;
VIRTUAL SUBSTRATES;
HIGH ELECTRON MOBILITY TRANSISTORS;
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EID: 0036181294
PISSN: 09611290
EISSN: None
Source Type: Journal
DOI: 10.1016/S0961-1290(02)85076-1 Document Type: Article |
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Times cited : (1)
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References (2)
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