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Volumn 33, Issue 1, 2002, Pages 1-6

Surface structuring and phase formation in thin metallic layers deposited at various temperatures

Author keywords

AFM; Diffusion; Metallic compounds; Multilayers; Nanotechnology; SEM; Surface artefacts; Surface structuring; XRD

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; INTERDIFFUSION (SOLIDS); MULTILAYERS; NANOTECHNOLOGY; PHASE COMPOSITION; ROUGHNESS MEASUREMENT; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS;

EID: 0036168947     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1151     Document Type: Article
Times cited : (5)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.