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Volumn 33, Issue 1, 2002, Pages 1-6
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Surface structuring and phase formation in thin metallic layers deposited at various temperatures
a b c d |
Author keywords
AFM; Diffusion; Metallic compounds; Multilayers; Nanotechnology; SEM; Surface artefacts; Surface structuring; XRD
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
DEPOSITION;
INTERDIFFUSION (SOLIDS);
MULTILAYERS;
NANOTECHNOLOGY;
PHASE COMPOSITION;
ROUGHNESS MEASUREMENT;
SCANNING ELECTRON MICROSCOPY;
SURFACE ROUGHNESS;
X RAY DIFFRACTION ANALYSIS;
PHASE FORMATION;
RAMAN ACTIVE SURFACE;
SUBSTRATE TEMPERATURE;
SURFACE ARTEFACTS;
SURFACE STRUCTURING;
SURFACE TOPOGRAPHY MEASUREMENT;
THIN METALLIC DOUBLE LAYERS;
METALLIC FILMS;
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EID: 0036168947
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/sia.1151 Document Type: Article |
Times cited : (5)
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References (13)
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