Plasma-assisted deposition of BN thin films from B(N3)3

Thin Solid Films

Volumn 402, Issue 1-2, 2002, Pages 162-166

  Hobbs, K R ^a   Coombe, R D ^a  

^a UNIVERSITY OF DENVER   (United States)

Author keywords

Boron nitride; Deposition process; Ion bombardment; Plasma processing and deposition

Indexed keywords

BORON COMPOUNDS; DEGRADATION; INFRARED RADIATION; ION BOMBARDMENT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

INFRARED ABSORPTION;

THIN FILMS;

EID: 0036147926     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01677-7     Document Type: Article

References (12)