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Applied Physics A: Materials Science and Processing

Volumn 65, Issue 1, 1997, Pages 1-4

Correlation between density and structure in boron nitride thin films by X-ray diffraction

(6) Donner, W a Chamera, S a Ruhm A a Dosch, H a Ulrich, S b Ehrhardt, H b

a UNIVERSITY OF WUPPERTAL (Germany)

b Rheinland Pfälzische Technische Universität Kaiserslautern Landau (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CRYSTALLIZATION; DENSITY (SPECIFIC GRAVITY); INFRARED SPECTROSCOPY; ION BOMBARDMENT; NANOSTRUCTURED MATERIALS; THIN FILMS; X RAY CRYSTALLOGRAPHY;

ION PLATING ENERGY; X RAY GLANCING ANGLE DIFFRACTION; X RAY REFLECTIVITY;

CUBIC BORON NITRIDE;

EID: 0031188623 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390050531 Document Type: Article

Times cited : (9)

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