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Volumn 87, Issue 9 I, 2000, Pages 4586-4590

A low energy method for the deposition of boron nitride thin films

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0007897968     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373106     Document Type: Article
Times cited : (5)

References (19)
  • 1
    • 0039141987 scopus 로고
    • Synthesis and Properties of Boron Nitride
    • Trans Tech, Aedermannsdort, Switzerland
    • Synthesis and Properties of Boron Nitride, Materials Science Forum, edited by J. Pouch and A. Alterovitz (Trans Tech, Aedermannsdort, Switzerland, 1990), Vols. 54 and 55.
    • (1990) Materials Science Forum , vol.54-55
    • Pouch, J.1    Alterovitz, A.2
  • 13
    • 0030085566 scopus 로고    scopus 로고
    • See, for example, S. D. Popa, J. Phys. D 29, 411 (1996).
    • (1996) J. Phys. D , vol.29 , pp. 411
    • Popa, S.D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.