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Volumn 87, Issue 9 I, 2000, Pages 4586-4590
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A low energy method for the deposition of boron nitride thin films
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0007897968
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.373106 Document Type: Article |
Times cited : (5)
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References (19)
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