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Journal of Chemical Physics

Volumn 116, Issue 1, 2002, Pages 275-280

The mechanism of HF/H2O chemical etching of SiO2

(2) Kang, Jeung Ku a Musgrave, Charles B a

a Stanford University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; CHEMICAL ACTIVATION; ETCHING; FLUORINE COMPOUNDS; HYDROLYSIS; PASSIVATION; QUANTUM THEORY; SURFACE CLEANING;

HYDROGEN FLUORIDE; QUANTUM CHEMISTRY;

SILICA;

EID: 0036143587 PISSN: 00219606 EISSN: None Source Type: Journal
DOI: 10.1063/1.1420729 Document Type: Article

Times cited : (108)

References (32)

1
- 0025456678
- (1990) Solid State Technol. , vol.33 , pp. 73
- Deal, B.E.¹ McNeilly, M.A.² Kao, D.B.³ Delarios, J.M.⁴

2
- 0026914357
- (1992) J. Electrochem. Soc. , vol.139 , pp. 2594
- Kuiper, A.E.T.¹ Lathouwers, E.G.C.²

3
- 0032206204
- (1998) Jpn. J. Appl. Phys., Part 1 , vol.37 , pp. 6123
- Habuka, H.¹ Otsuka, T.²

4
- 0001069476
- (1999) J. Chem. Phys. , vol.111 , pp. 2109
- Hoshino, T.¹ Nishioka, Y.²

5
- 0000189651
- (1993) J. Chem. Phys. , vol.98 , pp. 5648
- Becke, A.D.¹

6
- 67651141655
- (1971) J. Electrochem. Soc. , vol.118 , pp. 1772
- Judge, J.S.¹

7
- 0026634523
- (1992) J. Electron. Mater. , vol.21 , pp. 57
- McIntosh, R.¹ Kuan, T.S.² Defresart, E.³

8
- 0029197047
- (1995) J. Electrochem. Soc. , vol.142 , pp. 237
- Watanabe, H.¹ Ohnishi, S.² Honma, I.³ Kitajima, H.⁴ Ono, H.⁵ Wilhelm, R.J.⁶ Sophie, A.J.L.⁷

9
- 0001451172
- (1986) J. Appl. Phys. , vol.60 , pp. 3232
- Weinberger, B.R.¹ Peterson, G.G.² Eschrich, T.C.³ Krasinski, H.A.⁴

10
- 0021427329
- (1984) Solid State Commun. , vol.50 , pp. 673
- Ubara, H.¹ Imura, T.² Hiraki, A.³

11
- 0000703152
- (1986) Phys. Rev. Lett. , vol.57 , pp. 249
- Yablonovitch, E.¹ Allara, D.L.² Chang, C.C.³ Gmitter, T.⁴ Bright, T.B.⁵

12
- 36549099751
- (1988) Appl. Phys. Lett. , vol.53 , pp. 998
- Burrows, A.¹ Chabal, Y.J.² Higashi, G.S.³ Raghavachari, K.⁴ Christman, S.B.⁵

13
- 0001213089
- (1990) Phys. Rev. Lett. , vol.65 , pp. 504
- Trucks, G.W.¹ Raghavachari, K.² Higashi, G.S.³ Chabal, Y.J.⁴

14
- 84873055189
- (Wiley, New York)
- (1986) Ab Initio Molecular Orbital Theory
- Hehre, W.J.¹ Radom, L.² Schleyer, P.V.R.³ Pople, J.A.⁴

15
- 0000658913
- (1999) J. Appl. Phys. , vol.85 , pp. 2627
- Timpel, D.¹ Schaible, M.² Scheerschmidt, K.³

16
- 0025419047
- (1990) J. Non-Cryst. Solids , vol.120 , pp. 1
- Garofalini, S.H.¹

17
- 0034317112
- (2000) J. Chem. Phys. , vol.113 , pp. 9191
- Walsh, T.R.¹ Wilson, M.² Sutton, A.P.³

18
- 0001242209
- (1996) J. Chem. Phys. , vol.105 , pp. 3654
- Svensson, M.¹ Humbel, S.² Morokuma, K.³

19
- 0000061879
- (1999) J. Phys. Chem. B , vol.103 , pp. 1270
- DeLeeuw, N.H.¹ Higgins, F.M.² Parker, S.C.³

20
- 0003496090
- (Oxford University Press, Oxford)
- (1954) Dynamical Theory of Crystal Lattices
- Born, M.¹ Huang, K.²

21
- 37049076135
- (1991) J. Chem. Soc., Faraday Trans. , vol.87 , pp. 497
- Bolis, V.¹ Fubini, B.² Marchese, L.³ Martra, G.⁴ Costa, D.⁵

22
- 0011682081
- (1987) J. Chem. Phys. , vol.87 , pp. 5968
- Pople, J.A.¹ Head-Gordon, M.² Raghavachari, K.³

23
- 2042478652
- (1999) J. Comput. Chem. , vol.20 , pp. 1593
- Lii, J.H.¹ Ma, B.Y.² Allinger, N.L.³

24
- 18144432446
- (2000) J. Mol. Struct. , vol.550 , pp. 281
- George, W.O.¹ Jones, B.F.² Lewis, R.³ Price, J.M.⁴

25
- 0001847037
- (1994) Chem. Phys. Lett. , vol.221 , pp. 100
- Johnson, B.G.¹ Gonzales, C.A.² Gill, P.M.W.³ Pople, J.A.⁴

26
- 0030581027
- (1996) Chem. Phys. Lett. , vol.256 , pp. 603
- Jursic, B.S.¹

27
- 36549091139
- (1984) J. Chem. Phys. , vol.80 , pp. 3265
- Frisch, M.J.¹ Pople, J.A.² Binkley, J.S.³

28
- 0004133516
- Gaussian, Inc., Pittsburgh, PA
- (1999) Gaussian 98
- Frisch, M.J.¹ Trucks, G.W.² Schlegel, H.B.³

29
- 0001337734
- (1997) Phys. Rev. B , vol.55 , pp. 13783
- Yokozawa, A.¹ Miyamoto, Y.²

30
- 0022010673
- (1985) J. Appl. Phys. , vol.57 , pp. 1045
- Pluth, J.J.¹ Smith, J.V.² Faher, J.³

31
- 33751392522
- (1992) J. Phys. Chem. , vol.96 , pp. 1395
- Morrow, B.A.¹ McFarlan, A.J.²

32
- 0003422992
- (Gaussian, Inc., Pittsburgh, PA)
- (2000) Exploring Chemistry with Electronic Structure Methods, 2nd Ed.
- Foresmann, J.B.¹ Frisch, A.E.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.