Pneumatically actuated micro valve with a silicone rubber membrane for integration with fluid-handling systems

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 284-286

  Vieider, Christian ^a   Ohman, Ove ^a   Elderstig, Hakan ^a  

^a ACREO AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; FLOW CONTROL; MICROMACHINING; PNEUMATIC CONTROL EQUIPMENT; PRESSURE DROP; PRESSURE MEASUREMENT; RUBBER; SILICON WAFERS; SILICONES;

DEAD VOLUME; DEFLECTION GAP; FLUID HANDLING SYSTEMS; MICROVALVE; SILICON MICROMACHINING; SILICONE RUBBER MEMBRANE;

VALVES (MECHANICAL);

EID: 0029489467     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)