Self-assembly patterning of epitaxial CoSi2 wires

Microelectronic Engineering

Volumn 60, Issue 1-2, 2002, Pages 239-245

  Kluth, P ^a   Zhao, Q T ^a   Winnerl, S ^a   Mantl, S ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

CoSi2; Epitaxy; Nanopatterning; Nanowires; Silicides

Indexed keywords

COBALT COMPOUNDS; HETEROJUNCTIONS; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON;

MOLECULAR BEAM ALLOTAXY (MBA); NANOPATTERNING;

SELF ASSEMBLY;

EID: 0036133204     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00600-1     Document Type: Conference Paper

References (6)