Performance of interferometric rotation encoders using diffraction gratings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3099, Issue , 1997, Pages 166-175

  Voirin, Guy ^a   Benner, Ulrich ^a   Clube, Francis S ^a   Darbellay, Yves ^a   Parriaux, Olivier M ^a   Schneider, S M ^a   Sixt, Pierre ^a  

^a Microtechnology Neuchatel 7 Switz

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; INTERFEROMETERS; LASER PULSES; PERFORMANCE;

PHASE GRATINGS; ROTATION ENCODERS;

IMAGE CODING;

EID: 0031322456     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)