SCOPUS 정보 검색 플랫폼

Optical Engineering

Volumn 40, Issue 8, 2001, Pages 1464-1470

Phase relationships in a two-beam grating recombiner

(3) Jourlin, Y a Parriaux, O a Tishchenko, A V a

a UNIVERSITÉ JEAN MONNET (France)

Author keywords

Beams; Gratings; Phase

Indexed keywords

INTERFEROMETRY; LIGHT INTERFERENCE; LIGHT POLARIZATION; LIGHT REFLECTION; LIGHT SOURCES; LIGHT TRANSMISSION; OPTICAL BEAM SPLITTERS; OPTICAL SENSORS; PHASE SHIFT;

BLAZING EFFECTS;

DIFFRACTION GRATINGS;

EID: 0035414774 PISSN: 00913286 EISSN: None Source Type: Journal
DOI: 10.1117/1.1386375 Document Type: Article

Times cited : (11)

References (5)

1
- 0002969237
- Use of a crossed holographic grating as a reference for micropositioning the x-y stage of a wafer stepper
- pp. Lausanne, Switzerland
- (1981) Proc. Int. Conf. on Microlithology
- Trigréat, P.¹ Berger, L.²

2
- 0003272263
- Linear and angular encoders for the high-resolution range
- Progress in Precision Engineering and Nanotechnology, Braunschweig, Germany
- (1997) Proc. 9th Int. Precision Engineering Seminar , pp. 54-57
- Spies, A.¹

3
- 0031322456
- Performance of interferometric rotation encoder using diffraction gratings
- (1997) Proc. SPIE , vol.3099 , pp. 166-175
- Voirin, G.¹ Benner, U.² Clube, F.³ Darbellay, Y.⁴ Parriaux, O.⁵ Schneider, S.⁶ Sixt, P.⁷

4
- 0002970764
- Generalised source method; New possibilities for waveguide and grating problems
- Saint-Etienne, France
- (1999) Proc. Int. Workshop on Optical Waveguide Theory and Numerical Modelling , pp. 571-580
- Tishchenko, A.V.¹

5
- 0003037427
- E. Patent 0672891A1
- (1995)
- Kaneda, Y.¹ Ishizuka, K.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.