A microfabricated suspended-tube chemical reactor for fuel processing

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 232-235

  Arana, Leonel R ^a   Schaevitz, Samuel B ^a   Franz, Aleksander J ^a   Jensen, Klavs F ^a   Schmidt, Martin A ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; CATALYTIC CRACKING; CHEMICAL REACTORS; ELECTRIC GENERATORS; FABRICATION; HIGH TEMPERATURE OPERATIONS; HYDROGEN; SCANNING ELECTRON MICROSCOPY; THERMOELECTRIC EQUIPMENT; TUBES (COMPONENTS);

FUEL PROCESSING; HIGH TEMPERATURE ZONE; SUSPENDED-TUBE CHEMICAL REACTOR; THERMOELECTRIC GENERATORS; THERMOPHOTOVOLTAIC GENERATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036124069     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Feasibility of micro power supplies for MEMS
2. A combustion-based MEMS thermoelectric power generator
3. A six-wafer combustion system for a silicon micro gas turbine engine
4. Silicon nitride tubes for fluid flow and bubble growth visualization
5. Investigation of high-temperature degradation of platinum thin films with an in situ resistance measurement apparatus