A new laser micromachining technique using a mixed-mode ablation approach

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 152-155

  Zhu, Xiaoshan ^a   Choi, Jin Woo ^a   Cole, Robert ^a   Ahn, Chong H ^a  

^a University of Cincinnati   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CASTING; CRYSTAL MICROSTRUCTURE; ELECTROMAGNETIC FIELD EFFECTS; GEARS; HEAT AFFECTED ZONE; LASER APPLICATIONS; LIGHT POLARIZATION; MICROCRACKS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTIMIZATION; SEMICONDUCTING SILICON;

LASER CUTTING; LASER DRILLING; LASER MICROMACHINING; LASER POLARIZATION EFFECT; MATERIAL RECAST; MIXED MODE ABLATION APPROACH;

LASER ABLATION;

EID: 0036118225     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984227     Document Type: Article

References (8)

1. Integrated microfluidics/electrochemical sensor system for monitoring of environmental exposures to lead and chlorophenols
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3. Excimer laser micromachining and replication of 3D optical surfaces
4. Patterning, electroplating and removal of SU-8 moulds by excimer laser micromachining
5. Laser-stimulated molecular process on surfaces
6. Novel technique of through-hole laser drilling in teflon
7. Spatter-free laser percussion drilling of closely spaced array holes
8. Polarization effects in ultrashort-pulse laser drilling