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Volumn 189, Issue 1, 2002, Pages 203-207
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Microstructural studies of copper incorporated amorphous carbon nitride films
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Author keywords
[No Author keywords available]
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Indexed keywords
ADSORPTION;
BONDING;
CARBON NITRIDE;
COPPER;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
MAGNETRON SPUTTERING;
MICROSTRUCTURE;
NUCLEATION;
PHONONS;
X RAY PHOTOELECTRON SPECTROSCOPY;
AMORPHOUS CARBON NITRIDE FILMS;
AMORPHOUS FILMS;
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EID: 0036117634
PISSN: 00318965
EISSN: None
Source Type: Journal
DOI: 10.1002/1521-396X(200201)189:1<203::AID-PSSA203>3.0.CO;2-D Document Type: Conference Paper |
Times cited : (13)
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References (21)
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