메뉴 건너뛰기




Volumn 189, Issue 1, 2002, Pages 203-207

Microstructural studies of copper incorporated amorphous carbon nitride films

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; BONDING; CARBON NITRIDE; COPPER; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; MICROSTRUCTURE; NUCLEATION; PHONONS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0036117634     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200201)189:1<203::AID-PSSA203>3.0.CO;2-D     Document Type: Conference Paper
Times cited : (13)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.