High-spatial-resolution low-energy electron beam X-ray microanalysis

Mikrochimica Acta

Volumn 132, Issue 2-4, 2000, Pages 113-128

  Barkshire, Ian ^a   Karduck, Peter ^b   Rehbach, Werner P ^c   Richter, Silvia ^b  

^a OXFORD INSTRUMENTS PLASMA TECHNOLOGY   (United Kingdom)

^b RWTH AACHEN UNIVERSITY   (Germany)

^c NONE

Author keywords

Low voltage; SEM; Spatial resolution; X ray microanalysis

Indexed keywords

EID: 0002819485     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/s006040050052     Document Type: Article

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