Influence of micromachining on strength degradation of silicon nitride

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Volumn 216, Issue 1, 2002, Pages 55-60

  Wakuda, M ^a   Yamauchi, Y ^a   Kanzaki, S ^b  

^a Fine Ceramics Research Association   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Abrasive jet machining; Laser beam machining; Silicon nitride ceramic

Indexed keywords

BENDING STRENGTH; CERAMIC MATERIALS; DEGRADATION; LASER APPLICATIONS; LASER BEAM EFFECTS; MICROMACHINING; STRENGTH OF MATERIALS;

ABRASIVE JET MACHINING (AJM); LASER BEAM MACHINING (LBM);

SILICON NITRIDE;

EID: 0036105133     PISSN: 09544054     EISSN: None     Source Type: Journal    
DOI: 10.1243/0954405021519690     Document Type: Conference Paper

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