Compact low-loss monolithic CPW filters using air-gap overlay structures

IEEE Microwave and Wireless Components Letters

Volumn 11, Issue 8, 2001, Pages 328-330

  Kim, Hong Teuk ^a,b   Park, Jae Hyoung ^a,b   Kim, Yong Kweon ^a,b   Kwon, Youngwoo ^a,b  

^a Seoul National University ^*

^b Seoul National University   (South Korea)

Author keywords

Air gap overlay structure; Compact filter; Coplanar waveguide

Indexed keywords

CAPACITORS; DIELECTRIC LOSSES; ELECTRIC IMPEDANCE; ELECTRIC LINES; LOW PASS FILTERS; MONOLITHIC INTEGRATED CIRCUITS; WAVEGUIDES;

AIR-GAP OVERLAY STRUCTURES; COPLANAR WAVEGUIDE (CPW) FILTERS; METAL-AIR-METAL (MAM) CAPACITORS;

BANDPASS FILTERS;

EID: 0035428436     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/7260.941779     Document Type: Article

References (6)

1. Maltilayer MMIC Using a 3 μm × 3-layer dieletric film structure
2. Compact multilayer filter structures for coplanar MMICs
3. Multilayer CPW lowpass filters on GaAs/Gi MMICs
4. A new micromachined overlay CPW structrue with low attenuation over wide impedance ranges and its application to low-pass filters
5. A new micromachined overlap CPW structure with low attenuation over wide impedance ranges