Compensating differences between measurement and calibration wafer in probe-tip calibrations

IEEE MTT-S International Microwave Symposium Digest

Volumn 3, Issue , 2002, Pages 1837-1840

  Carchon, Geert ^a   De Raedt, Walter ^a   Beyne, Eric ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CAPACITANCE; COMPUTER SIMULATION; ELECTRIC ADMITTANCE; ELECTRIC IMPEDANCE MEASUREMENT; ELECTRIC RESISTANCE; INDUCTANCE; PERMITTIVITY; SCATTERING PARAMETERS; SEMICONDUCTING GALLIUM ARSENIDE; TRANSMISSION LINE THEORY; WAVEGUIDES;

CALIBRATION WAFER; PROBE TO TIP CALIBRATIONS; PROBE TO TIP TO LINE; SHUNT ADMITTANCCE;

MICROWAVE MEASUREMENT;

EID: 0036063698     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Characterizing differences between measurement and calibration wafer in probe-tip calibrations
2. Compensation for geometrical variations in coplanar waveguide probe-tip calibration
3. Comparison of on-wafer calibrations
4. Accurate characteristic impedance measurement on silicon
5. Accurate transmission line characterisation on high and low-resistivity substrates
6. Accurate transmission line characterization