Accurate transmission line characterization on high and low-resistivity substrates

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2001, Pages 1539-1542

  Carchon, Geert ^a   De Raedt, Walter ^a   Nauwelaers, Bart ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ELECTRIC IMPEDANCE; ERROR ANALYSIS; PERMITTIVITY MEASUREMENT; PROBES; SCATTERING PARAMETERS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SILICON WAFERS; SUBSTRATES;

ERRORBOX; LOW-RESISTIVITY SUBSTRATES; PROBE-TIP-TO-LINE GEOMETRY; TWO-PORT MEASUREMENT;

ELECTRIC LINES;

EID: 0035682999     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Accurate transmission line characterization
2. Characterizing differences between measurement and calibration wafer in probe-tip calibrations
3. Accurate characteristic impedance measurement on silicon
4. A new method for characteristic impedance determination on lossy substrate
5. Comparison of on-wafer calibrations
6. Compensating differences between measurement and calibration wafer in probe-tip calibrations- de-embedding of line parameters
7. Improved calibration and measurement of the scattering parameters of microwave integrated circuits
8. Broadband characterization of conductor-backed coplanar waveguide using accurate on-wafer measurement techniques