Radiative recombination processes of thermal donors in silicon

Materials Research Society Symposium - Proceedings

Volumn 692, Issue , 2002, Pages 275-281

  Pizzini, S ^a   Binetti, S ^a   Leoni, E ^a   Le Donne, A ^a   Acciarri, M ^a   Castaldini, A ^a  

^a UNIVERSITY OF MILANO BICOCCA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DEEP LEVEL TRANSIENT SPECTROSCOPY; ION IMPLANTATION; LIGHT EMITTING DIODES; PHOTOLUMINESCENCE; PLASTIC DEFORMATION; SEMICONDUCTOR DOPING; ULSI CIRCUITS;

OLD THERMAL DONORS (OTD);

SEMICONDUCTING SILICON;

EID: 0036060240     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)