Atomistic simulations of deposition processes of epitaxial layers

Materials Research Society Symposium - Proceedings

Volumn 696, Issue , 2002, Pages 39-44

  Shintani, K ^a   Sugii, H ^a   Nishimura, M ^a   Nakajima, T ^a  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; MOLECULAR BEAM EPITAXY; MOLECULAR DYNAMICS; MONTE CARLO METHODS; MORPHOLOGY; SELF ASSEMBLY; SEMICONDUCTING SILICON; SEMICONDUCTOR QUANTUM DOTS;

ATOMISTIC SIMULATIONS; EPITAXIAL LAYERS; HETEROEPITAXIAL STRUCTURES; INTERACTION FORCES; STILLINGER WEBER POTENTIAL; STRANSKI-KRISTANOV MODE;

DEPOSITION;

EID: 0036054378     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)