Technological pathways for 21st century active matrix x-ray imager development

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4682, Issue , 2002, Pages 1-8

  Antonuk, Larry E ^a   El Mohri, Youcef ^a   Jee, Kyung Wook ^a   Zhao, Qihua ^a   Sawant, Amit ^a   Su, Zhong ^a   Street, Robert A ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b PALO ALTO RESEARCH CENTER   (United States)

Author keywords

Active matrix flat panel imager; AMFPI; Direct detection; Indirect detection; TFT; Thin film transistor

Indexed keywords

AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; CAPACITORS; MICROMACHINING; ORGANIC CONDUCTORS; PHOTOCONDUCTING MATERIALS; POLYSILICON; THIN FILM TRANSISTORS; X RAYS;

ACTIVE MATRIX FLAT-PANEL IMAGERS; X-RAY IMAGERS;

IMAGING SYSTEMS;

EID: 0036033576     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.465545     Document Type: Article

References (11)

1. L.E. Antonuk, K.-W. Jee, Y. El-Mohri, M. Maolinbay, S. Nassif, X. Rong, Q. Zhao, J.H. Siewerdsen, "Strategies to Improve the Signal and Noise Performance Of Active Matrix, Flat-Panel Imagers For Diagnostic X-ray Applications," Med. Phys. 27(2), 289-306 (2000).
2. M. Maolinbay, T. Zimmerman, R.J. Yarema, L.E. Antonuk, Y. El-Mohri, and M. Yeakey, "Design and performance of a low noise, 128-channel ASIC preamplifier for readout of active matrix, flat-panel imaging arrays," accepted for publication in Nucl. Instr. Meth. A (2001).
3. M. Mulato, F. Lemmi, R. Lau, J.P. Lu, J. Ho, S.E. Ready, J.T. Rahn, and R.A. Street, "Charge collection and capacitance in continuous film flat panel detectors," SPIE 3977, Physics of Medical Imaging, 26-37 (2000).
4. M. Mulato, J.P. Lu, and R.A. Street, "Simulated and measured data-line parasitic capacitance of amorphous silicon large-area image sensor arrays," J. Appl. Phys. 89, 638-647 (2001).
5. 2 as direct detector materials for high resolution x-ray image sensors," SPIE 4320, Physics of Medical Imaging, 1-12 (2001).
6. J.B. Boyce, J.P. Lu, J. Ho, R.A. Street, K. Van Schuylenbergh, Y. Wang, Pulsed laser crystallization of amorphous silicon for polysilicon flat-panel imagers, J. Non-Cryst Solids, in press.
7. J.T. Rahn, F. Lemmi, R.L. Weisfield, R. Lujan, P. Mei, J.P. Lu, J. Ho, S.E. Ready, R.B. Apte, P. Nylen, J. Boyce, and R.A. Street, "High resolution, high fill factor a-Si:H sensor arrays for medical imaging," SPIE 3659, Physics of Medical Imaging, 510-517 (1999).
8. MEMS and MOEMS Technology and Applications, P. Rai-Choudhury (ed.), SPIE Press, Bellingham, 2000.
9. J.H. Daniel, B. Krusor, R.B. Apte, M. Mulato, K. Van Schuylenbergh, R. Lau, T. Do, R.A. Street, A. Goredema, D.C. Boils-Boissier, and P.M. Kazmaier "Micro-electro-mechanical system fabrication technology applied to large area X-ray image sensor arrays," J. Vac. Sci. Technol. 19, 1219-1223 (2001).
10. W.S. Wong, S. Ready, R. Matusiak, S.D. White, J.-P. Lu, J. Ho, and R.A. Street, "Amorphous silicon thin-film transistors and arrays fabricated by jet-printing," Appl Phys Lett, 80, 610-612 (2002).
11. D. Knipp, R.A. Street, B. Krusor, R.B. Apte, and J. Ho, "Comparison of the gate dielectric on the morphological and electronic structure study of pentacene thin film for transistor applications," Organic Field Effect Transistors, Proc. SPIE, 4466, in press.