Resolution enhancement through a rule-free optical proximity correction in optical lithography

Journal of the Korean Physical Society

Volumn 33, Issue SUPPL. 2, 1998, Pages

  Oh, Yong Ho ^a   Lee, Jai Cheol ^a   Lim, Sungwoo ^a  

^a Wonkwang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032261065     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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