Controlled tuning of periodic morphologies on vicinal Si(111) surfaces

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 3, 2002, Pages 960-963

  Szkutnik, Pierre David ^a   Sander, Dirk ^a   Dulot, Frédéric ^a   Arnaud d'Avitaya, François ^a   Hanbücken, Margrit ^a  

^a CAMPUS DE LUMINY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; DIFFRACTION; HEAT TREATMENT; LITHOGRAPHY; MICROSCOPIC EXAMINATION; MORPHOLOGY; SILICON; SURFACES; ULTRAHIGH VACUUM;

OPTICAL LITHOGRAPHY;

SURFACE STRUCTURE;

EID: 0035998524     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1477426     Document Type: Conference Paper

References (17)