Step arrangement design and nanostructure self-organization on Si(111) surfaces by patterning-assisted control

Applied Surface Science

Volumn 107, Issue , 1996, Pages 1-5

  Ogino, Toshio ^a   Hibino, Hiroki ^a   Homma, Yoshikazu ^b  

^a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

^b NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BAND STRUCTURE; CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; SURFACES; VACUUM APPLICATIONS;

ATOMIC STEP ARRANGEMENTS; SUBSTRATE MISORIENTATIONS;

SILICON WAFERS;

EID: 0030566281     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00481-3     Document Type: Article

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