Anomalous behavior of electron temperature in silane glow discharge plasmas

Thin Solid Films

Volumn 390, Issue 1-2, 2001, Pages 83-87

  Takai, Madoka ^a   Nishimoto, Tomonori ^a   Kondo, Michio ^a   Matsuda, Akihisa ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

Electron temperature; Higher silane molecules; Silane plasma

Indexed keywords

CARRIER CONCENTRATION; GLOW DISCHARGES; SILANES; SUBSTRATES; TEMPERATURE MEASUREMENT;

ELECTRON TEMPERATURE;

PLASMAS;

EID: 0035973324     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)00942-7     Document Type: Article

References (10)