Direct observation of a critical length effect in dual-damascene Cu/oxide interconnects

Applied Physics Letters

Volumn 78, Issue 18, 2001, Pages 2652-2654

  Ogawa, Ennis T ^a   Bierwag, Alexander J ^a   Lee, Ki Don ^a   Matsuhashi, Hideki ^a   Justison, Patrick R ^a   Ramamurthi, Anup N ^a   Ho, Paul S ^a   Blaschke, Volker A ^b   Griffiths, David ^b   Nelsen, Anne ^b   Breen, Mark ^b   Havemann, Robert H ^b  

^a The University of Texas at Austin   (United States)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035971713     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1365414     Document Type: Article

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