Miniature conical transducer realized by excimer laser micro-machining technique

Sensors and Actuators, A: Physical

Volumn 93, Issue 1, 2001, Pages 57-62

  Lee, Yung Chun ^a   Kuo, Shi Hoa ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Acoustic emission sensor; Excimer laser micro machining; NBS conical transducer; Piezoelectric transducer

Indexed keywords

ACOUSTIC EMISSIONS; EXCIMER LASERS; MICROMACHINING; PERFORMANCE; SCANNING ELECTRON MICROSCOPY; SENSORS;

ACOUSTIC EMISSION SENSOR; CONICAL TRANSDUCER;

PIEZOELECTRIC TRANSDUCERS;

EID: 0035948959     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00519-2     Document Type: Article

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