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Thin Solid Films

Volumn 396, Issue 1-2, 2001, Pages 23-28

Low-temperature deposition of highly [100]-oriented MgO films using charged liquid cluster beam

(5) Rhee, S H a Yang, Y a Choi, H S b Myoung, J M a Kim, K a

a University of Illinois at Urbana Champaign (United States)

b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

Author keywords

CLCB; Flat panel displays; MgO; Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; FLAT PANEL DISPLAYS; MAGNESIA; MORPHOLOGY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SOL-GELS; X RAY PHOTOELECTRON SPECTROSCOPY;

LIQUID CLUSTER BEAMS;

THIN FILMS;

EID: 0035929009 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01183-X Document Type: Article

Times cited : (33)

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