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Thin Solid Films

Volumn 396, Issue 1-2, 2001, Pages 62-68

Effect of process pressure on diamond-like carbon deposited using electron cyclotron resonance chemical vapor deposition

(5) Yoon, S F a Tan, K H a Rusli, a Ahn, J a Huang, Q F a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

Carbon; Chemical vapor; Fourier transform; Raman scattering

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; ION BOMBARDMENT; RAMAN SPECTROSCOPY;

OPTICAL EMISSION SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 0035929005 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01177-4 Document Type: Article

Times cited : (6)

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