Hydrogen incorporation in dual-mode PECVD amorphous silicon oxide thin films

Surface and Coatings Technology

Volumn 80, Issue 1-2, 1996, Pages 8-12

  Etemadi, R ^a   Godet, C ^a   Perrin, J ^a   Bouree J E ^a   Drevillon B ^a   Clerc, C ^b  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b 91405 Orsay Campus   (France)

Author keywords

Amorphous films; Dual mode PECVD; Hydrogen content; Silicon oxide

Indexed keywords

ABSORPTION; AMORPHOUS FILMS; ANNEALING; BONDING; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; HYDROGEN; INFRARED SPECTROSCOPY; PLASMA APPLICATIONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICA; STOICHIOMETRY;

ABSORPTION BAND; ATOMIC CONCENTRATION; BENDING MODE; ELASTIC RECOIL DETECTION ANALYSIS; HYDROGEN CONTENT; INTEGRATED ABSORBANCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUANTITATIVE ANALYSIS; STRETCHING MODES;

THIN FILMS;

EID: 0030107686     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(95)02677-0     Document Type: Article

References (15)

1. P.G. Pai, S.S. Chao, Y. Takagi and G. Lucovsky, J. Vac. Sci. Technol. A, 4 (1986) 689.
2. F. Ferrieu and R.A.B. Devine, J. Non-Cryst. Solids, 113 (1989) 100.
3. S.V. Hattangady, R.G. Alley, G.G. Fountain, R.J. Markunas, G. Lucovsky and D. Temple, J. Appl. Phys., 73 (1993) 7635.
4. B. Gruska and K. Wandel, Thin Solid Films, 233 (1993) 240.
5. T. Fuyuki, T. Furukawa, T. Oka and H. Matsunami, IEEE Trans. Electron., 75 (1992) 1013.
6. J.C. Rostaing, F. Coeuret, B. Drévillon, R. Etemadi, C. Godet, J. Huc, J.Y. Parey and V.A. Yakovlev, Thin Solid Films, 236 (1993) 58.
7. R. Etemadi, C. Godet, M. Kildemo, J.E. Bourée and B. Drévillon, in R.A. Devine, J. Kanicki, W.L. Warren and M. Matsumura (eds.), European Material Research Society (E-MRS) Conference, Strasbourg, France, 1994, J. Non-Cryst. Solids, 187 (1995) 70.
8. R. Etemadi, O. Leroy, B. Drévillon and C. Godet, in E.A. Schiff, M. Hack, M.J. Powell, A. Madan and A. Matsuda (eds.), Mater. Res. Soc. Symp. Proc., 336 (1994) 109.
9. G.G. Ross and I. Richard, Nucl. Instrum. Methods Phys. Res. B, 64 (1992) 603.
10. T. Saitoh, K. Mori and R. Itoh, Chem. Phys., 60 (1981) 161.
11. A.A. Langford, M.L. Fleet, B.P. Nelson, W.A. Langford and N. Maley, Phys. Rev. B, 45 (1992) 13367.
12. E.D. Palik, Handbook of Optical Constants of Solids, Vol. I, Academic Press, New York, 1985, p. 749.
13. E.D. Palik, Handbook of Optical Constants of Solids, Vol. II, Academic Press, New York, 1991, p. 1059.
14. F.W. Smith and Z. Yin, J. Non-Cryst. Solids, 137/138 (1991) 871.
15. A.C. Adams, Solid State Technol., April (1983) 135-139.