Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

Applied Surface Science

Volumn 181, Issue 3-4, 2001, Pages 248-254

  Wang, H ^a   Lin, J ^a   Huan, C H A ^a   Dong, P ^a   He, J ^a   Tang, S H ^a   Eng, W K ^a   Thong, T L J ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Carbon nanotubes; Lithography; Pattern; PE CVD; SEM

Indexed keywords

ACETYLENE; ARRAYS; CATALYSTS; HIGH RESOLUTION ELECTRON MICROSCOPY; HYDROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

MICROPATTERNS;

CARBON NANOTUBES;

EID: 0035928974     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00391-9     Document Type: Article

References (20)