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Volumn 78, Issue 22, 2001, Pages 3547-3549

Photon energy dependence of contrast in photoelectron emission microscopy of Si devices

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0035926662     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1376151     Document Type: Article
Times cited : (12)

References (13)
  • 6
    • 0347652221 scopus 로고    scopus 로고
    • note
    • Computer code Suprem-IV, Stanford University, Palo Alto, CA. Calculates one-dimensional and two-dimensional implant profiles with pre- and postannealing simulations.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.