Damage buildup in Si under bombardment with MeV heavy atomic and molecular ions

Journal of Applied Physics

Volumn 90, Issue 8, 2001, Pages 3867-3872

  Titov, A I ^a   Kucheyev, S O ^b   Belyakov, V S ^a   Azarov, A Yu ^a  

^a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035886319     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1404426     Document Type: Article

References (27)

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