Improvement of the electrochemical behaviour of AlN films produced by reactive sputtering using various under-layers

Electrochimica Acta

Volumn 46, Issue 24-25, 2001, Pages 3827-3834

  Strehblow, Hans Henning ^a   Maurice, Vincent ^b   Marcus, Philippe ^b  

^a HEINRICH HEINE UNIVERSITY   (Germany)

^b SORBONNE UNIVERSITÉ   (France)

Author keywords

Aluminium nitride; Corrosion protection; Reactive sputtering; Under layer

Indexed keywords

ATOMIC FORCE MICROSCOPY; CORROSION RESISTANCE; ELECTROCHEMISTRY; POROSITY; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPIC ANALYSIS; SPUTTERING; STEEL; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

REACTIVE SPUTTERING;

ALUMINUM NITRIDE;

EID: 0035880409     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0013-4686(01)00669-7     Document Type: Article

References (16)