Critical epitaxial film thickness for forming interface dislocations

Materials Science and Engineering: A

Volumn 309-310, Issue , 2001, Pages 473-477

  Lee, Sanboh ^a   Wang, Shing Dar ^b   Hsueh, Chun Hway ^c  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b Chung Chou Junior College of Technology and Commerce   (Taiwan)

^c OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Critical thickness; Dislocation; Epitaxial film; Modeling

Indexed keywords

ELASTIC MODULI; STRAIN; STRESS ANALYSIS; THIN FILMS;

EPITAXIAL FILMS;

MATERIALS SCIENCE;

PLASTIC DEFORMATION;

EID: 0035879736     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(00)01717-2     Document Type: Article

References (17)

1. Stress intensity factor for a system crack in an infinite strip